Semiconductor microfabrication technologies.

Microfabrication technologies for integrated nucleic acid analysis.

X Chromosome Map at 75-kb STS Resolution, Revealing Extremes of Recombination and GC Content Ramaiah Nagaraja, Sandra MacMillan, Juha Kere, Carmela Jones, Stephanie Griffin, Matthew Schmatz, Jennifer Terrell, Michael Shomaker, Christopher Jermak, Christian Hott, Mochubeloa Masisi, Steven Mumm, Anand Srivastava, Giuseppe Pilia, Terence Featherstone, Richard Mazzarella, Sheila Kesterson, Brigid M...

Editor's Introduction: Semiconductor Technologies

Status and Application of Advanced Semiconductor Technologies

GaAs HBT technology is being challenged for existing and new product applications. SiC FETs and GaN HEMTs have been shown to have significant power delivery advantage when large supply voltages are required. InP HBTs are emerging as the next technology for very high-speed applications. After years of promise and controversy, the SiGe HBT is beginning to be applied in high-performance systems. P...

Pushing forward with compound semiconductor technologies

rapidly, with many new achievements and records reported by research groups at the 2017 Symposium on VLSI Technology and Circuits in Kyoto, Japan (5–9 June). Most of the reported work involved indium gallium arsenide (InGaAs), particularly integrated with silicon (Si) substrates aiming for low-cost mass production. We report here on those sessions, along with research aimed at gallium nitride (...

Incorporating DSA in multipatterning semiconductor manufacturing technologies

Multi-patterning (MP) is the process of record for many sub-10nm process technologies. The drive to higher densities has required the use of double and triple patterning for several layers; but this increases the cost of the new processes especially for low volume products in which the mask set is a large percentage of the total cost. For that reason there has been a strong incentive to develop...